2025/11/27
With a deep commitment to the global market, Shanghai Dengsheng Instrument has earned international acclaim for its quality.








The Class 100 Cleanroom Drying Oven, also known as a Class 100 Cleanroom Baking Oven or Class 100 Cleanroom Drying Cabinet, is a special equipment that integrates high-temperature drying with cleanroom environment control. Through a HEPA high-efficiency filtration system and directional airflow organization, the working chamber achieves ISO 6 (formerly Class 100) cleanliness standards. The equipment adopts a laminar vertical or horizontal airflow mode, where clean hot air is filtered by a top-mounted FFU unit (filtration efficiency ≥99.99% for 0.3μm particles) and evenly distributed across the working surface. It is also equipped with an automatic air shower purification module to ensure rapid recovery of cleanliness during door opening operations. The temperature control range covers 50-300℃, with a fluctuation of ≤±1℃. It is suitable for drying processes sensitive to particulate contamination in precision manufacturing fields. It is mainly used in electronics, integrated circuits, COB black glue drying and curing, displays, chips, LCDs, CMOS, IS, and pharmaceutical industries. It can also be used for high-temperature testing requiring high environmental cleanliness. It is an essential equipment for drying, heat treatment, thermal aging, high-temperature testing, and curing of items in the above industries.
① Built-in high-efficiency HEPA/ULPA filters provide a filtration efficiency of up to 99.99% for 1µm particles, ensuring continuous ISO Class 5 (Class 100) cleanliness within the chamber, meeting the stringent requirements of precision processes.
② Utilizing advanced fluid dynamics design and high-performance fans, it achieves vertical laminar flow circulation of hot air within the chamber, ensuring temperature uniformity of ≤±1.5℃ in the working area.
③ All inner walls feature rounded corners, seamless welding, and electropolishing treatment, fundamentally eliminating cleaning dead zones and the risk of particle accumulation, guaranteeing process purity.
④ Equipped with a color touch screen and a multi-segment programmable PLC controller, it allows for precise setting of heating, constant temperature, and cooling curves, enabling full automation and data traceability for complex processes.
⑤ The core chamber is typically made of SUS304 brushed stainless steel, possessing excellent high-temperature and corrosion resistance, especially suitable for sensitive processes such as semiconductors and photoresists.
⑥ Composed of a high-temperature resistant centrifugal fan and a precision air guiding system, it ensures rapid and uniform heat transfer to every surface of the material, significantly improving drying efficiency and consistency.
⑦ Utilizing double sealing strips made of silicone rubber or fluororubber, and supplemented by a pneumatic locking device, it effectively isolates external contaminated air intrusion while ensuring the stability of the internal process atmosphere.
⑧ Integrated multiple hardware and software safety circuits, including over-temperature protection, over-current protection, fan interlock, and leakage protection, providing robust protection for the long-term stable operation of the equipment and products.
⑨ Through inner chamber mirror polishing and high-temperature baking decontamination treatment, it significantly reduces volatile organic compounds that the equipment may generate during high-temperature operation.
⑩ Using high-performance insulation materials and optimized heater layout, combined with a PID adaptive power adjustment algorithm, it achieves rapid heating and precise temperature control while effectively reducing energy consumption.
⑪ Optional nitrogen or other inert gas interfaces and a chamber micro-positive pressure control system are available to create an excellent oxygen-free drying environment for processes sensitive to oxygen or moisture.
⑫ Core modules such as filters, fans, and heaters adopt standardized and quick-release structures, greatly simplifying daily maintenance, cleaning, and spare parts replacement processes, reducing downtime. ⑬ Independent chamber environment and efficient filtration system effectively prevent cross-contamination between different batches of materials, making it especially suitable for R&D and production of multiple varieties and small batches.
⑭ Its excellent cleanliness and temperature control performance make it perfectly suited for cutting-edge fields in high-tech industries such as semiconductor chip manufacturing, MEMS packaging, biopharmaceuticals, and precision optics.
⑮ Guaranteed after-sales service: A comprehensive after-sales service network covering most parts of the country ensures worry-free use for users (Note: excluding a very few remote towns and villages);
⑯Technical support solutions: Provides multi-faceted technical guidance including video, telephone, and online video tutorials, intuitively demonstrating equipment performance and operating methods to help users quickly master the equipment.
① Outer Shell Material: Made of selected high-quality cold-rolled steel plate (Q235), precision-formed using CNC technology. The surface is treated with phosphating and anti-static powder coating, resulting in a robust shell. It is anti-static, corrosion-resistant, and scratch-resistant, ensuring long-lasting quality;
② Working Chamber: Made of thickened SUS304 stainless steel, possessing excellent high-temperature stability and corrosion resistance, with a smooth surface for easy cleaning;
③ Control Panel: High-end color screen controller, displaying key data such as temperature and time in real-time with high accuracy. Features intelligent fault diagnosis and alarm functions, providing intuitive human-machine interaction and complete control at your fingertips;
④ Circulation System: Utilizes a powerful turbine fan and scientific airflow design to achieve high-speed hot air circulation, ensuring excellent temperature uniformity inside the working chamber, preventing localized overheating, and significantly improving drying efficiency and processing consistency;
⑤ Equipped with multiple safety mechanisms such as over-temperature protection and overload protection, ensuring long-term stable operation, suitable for high-frequency use in research;
⑥ Insulation Layer: The space between the outer shell and the working chamber is filled with 75mm thick high-purity ceramic fiber cotton (Al₂O₃), providing superior thermal insulation, greatly reducing heat loss, ensuring constant temperature, and achieving high energy efficiency;
⑦ Door Seal: Can withstand thermal oxidative aging for a long time, maintaining elasticity and sealing integrity, effectively preventing heat loss and ensuring the stability of the working chamber temperature;
⑧ Heating Tube: Made of stainless steel and high-resistance electric heating alloy wire, with a thermal efficiency exceeding 95%. The integrated design provides good insulation, corrosion resistance, and oxidation resistance, suitable for high-temperature, humid, and corrosive industrial environments, ensuring long life and stable performance;
⑨ Shelves: Standard configuration includes high-corrosion-resistant chrome-plated mesh shelves with surface hardening treatment, providing oxidation resistance, acid and alkali resistance, and stable load-bearing capacity; supports flexible customization of various materials and hole types, including stainless steel, alloy, and Teflon, perfectly matching demanding applications in pharmaceuticals, electronics, and scientific research, providing precise and reliable load-bearing solutions for high-end drying processes.
⑩ Some large-capacity models are equipped with high-performance silent universal wheels, combining flexible movement with stable positioning, suitable for precision laboratories and high-end industrial environments, showcasing detailed technology and user-friendly design.
① Adopting advanced PID algorithms and multi-segment programmable controllers, it can precisely set and automatically execute complex heating, constant temperature, and cooling curves. Program mode and fixed-value mode can be freely switched, ensuring the repeatability and reliability of the process.
② Equipped with a large-size high-definition touch screen, providing an intuitive graphical operation experience, real-time dynamic display of all operating parameters, equipment status, and real-time curves, simplifying the operation process.
③ Integrated multi-point temperature sensors, and expandable with air pressure and dew point (humidity) monitoring modules, providing comprehensive real-time monitoring of the internal environment of the chamber to ensure stable process conditions.
④ Real-time monitoring of fan operation and high-efficiency filter status, interlocked with the heating system, ensuring stable airflow circulation and maintaining Class 100 cleanliness to prevent particulate contamination.
⑤ Optional mass flow controller (MFC) and micro-positive pressure control system for precise control of the flow rate of inert gases such as nitrogen and the pressure inside the chamber, providing a protective atmosphere for sensitive processes.
⑥ Built-in large-capacity storage chip, which automatically records all process parameters, curves, and alarm events, supporting data export and audit trails to meet strict quality management standards.
⑦ Integrated independent over-temperature protector, leakage protector, fan overload protection, and door interlock switch and other hardware circuits, building a multi-layered safety barrier combining hardware and software.
⑧ Standard configuration with Ethernet and RS-485 communication interfaces, supporting remote monitoring and data acquisition, enabling integration with factory MES systems, laying the foundation for smart factories.
⑨ Supports multi-level password permission settings, differentiating between administrator and operator privileges, effectively preventing unauthorized parameter modification and ensuring the security of core process recipes and equipment operation.
⑩ Features a comprehensive system self-check function, which can diagnose and accurately locate abnormal conditions in real time, issuing audible and visual alarms and displaying fault information, greatly improving maintenance efficiency.
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Model |
DEP-185HD |
DEP-275HD |
DEP-485HD |
DEP-985HD |
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Controller |
Integrated PLC (100 groups / 100 segments per group) |
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Human-Machine Interface (HMI) |
7-inch Touchscreen |
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Cleanliness Class |
Class 100 |
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Temperature Range |
RT+10~250℃ |
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Temperature Uniformity |
±2.5%℃ |
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Temperature Fluctuation |
≤±1℃ |
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Chamber Particle Concentration |
1um≤8320pc/m³ |
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Timer Range |
0~9999min |
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Filter |
H14 High-Temperature HEPA Filter |
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Access Control System |
Electromagnetic Lock (Interlock) |
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Filter Dimensions (mm) |
480x350x90 |
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Rated Airflow |
650m³/h |
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Chamber Dimensions (mm) |
600x500x600 |
600*500*900 |
800*600*1000 |
1000*700*1400 |
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Exterior Dimensions (mm) |
965x1240x1510 |
965x1240x1810 |
1290x965x1790 |
1950x1055x1790 |
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Volume |
180L |
270L |
480L |
980L |
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Power Supply |
AC220V/18A |
220V/20A |
380V/18A |
380V/30A |
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Rated Power |
3.5KW |
4KW |
6KW |
9KW |
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Gross Weight / Net Weight |
300/255KG |
350/320KG |
490/450KG |
810/730KG |
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Standard Shelves |
2 |
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Operating Environment |
0~45℃ |
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No. |
Name |
Parameters |
Reference Photo |
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1 |
Mass Flow Controller | ① 0~30 L/min |
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2 |
Independent Over-Temperature Limiter |
① Secondary protection against temperature overshoot and runaway |
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3 |
Built-in Printer |
① Real-time printing |
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4 |
Test Port |
① Material: Stainless steel + bakelite |
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5 |
Multi-point Temperature Recorder |
① 6 channels |
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Products provided by famous enterprises are deeply trusted by users.
Shanghai Dengsheng Instrument Manufacturing Co., Ltd. is a high-tech enterprise integrating R&D, production, sales, and service. We specialize in the manufacture of high-end laboratory equipment, including ovens, incubators, industrial furnaces, and environmental test chambers.
As 250℃ High Temperature Resistant Class 100 Clean Drying Oven Manufacturers and 250℃ High Temperature Resistant Class 100 Clean Drying Oven Factory in China, We boast an 8,000-square-meter modern production facility, a dedicated R&D team, 23 national patents, and ISO-9001 quality management system certification. Our solutions are widely used in cutting-edge fields such as aerospace, semiconductors, biomedicine, automotive, and new materials. We have established in-depth partnerships with top universities and industry leaders, supply 250℃ High Temperature Resistant Class 100 Clean Drying Oven Wholesale, our products are exported to many countries and regions around the world.
Adhering to the principles of "Integrity, Innovation, and Win-Win," we are committed to becoming your trusted partner with reliable quality and dedicated service.
We welcome inquiries and cooperation from both new and existing customers, providing professional equipment solutions.
2025/11/27
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2025/11/12