2025/11/27
With a deep commitment to the global market, Shanghai Dengsheng Instrument has earned international acclaim for its quality.


Vacuum atmosphere furnaces are core equipment for high-temperature heat treatment of materials by creating a vacuum and introducing a controlled atmosphere (such as inert, reducing, or carbonitriding atmospheres). Their exceptional process flexibility makes them indispensable in numerous high-end manufacturing and cutting-edge research fields. In the field of new materials research and development, they are key equipment for synthesizing high-performance ceramics (such as silicon nitride and silicon carbide), nanomaterials (such as graphene and carbon nanotubes), and metal compounds. By sintering and heat-treating in an oxygen-free environment, they effectively prevent material oxidation and improve density and performance. In the powder metallurgy industry, they are used for sintering and densification of metal or ceramic powders, significantly improving the mechanical strength, hardness, and wear resistance of the products. In the semiconductor and electronics industries, they are used for diffusion, annealing, and oxidation processes of wafers, as well as heat treatment of magnetic materials, electronic pastes, and components. Furthermore, in the new energy sector, vacuum atmosphere furnaces are widely used in the sintering of positive and negative electrode materials for lithium-ion batteries, solid electrolyte synthesis, and heat treatment of silicon wafers in the photovoltaic industry, ensuring critical electrochemical performance through precise atmosphere control. They are also an important platform for hard alloy tools, quartz glass annealing, and high-temperature reaction mechanism research in research institutions, fully meeting the stringent requirements of modern industry for high-performance, high-purity materials and process consistency.
① Adopting intelligent PID fuzzy control technology, compared with traditional PID control methods, it offers advantages such as smaller temperature overshoot, faster stabilization time, and better temperature control accuracy. Combined with high-precision sensors, the temperature control accuracy can reach ±1℃, and it features internal parameter self-tuning function, ensuring precise and reliable temperature control to meet demanding experimental requirements;
② Color LCD screen: Standard configuration includes a color screen and touch-sensitive buttons, displaying parameters such as set temperature, operating temperature, constant temperature time, and fault information on a single screen; Integrating a microprocessor intelligent temperature control system, it features dynamic adjustment of PID parameters, offering fast response speed and temperature overshoot suppression;
③ Powerful timing function: The timing function is selectable (none, constant temperature timing, power-on timing, and can be divided into forward and countdown modes), and the timing unit is selectable (minutes, hours);
④ The entire series is equipped with a door-opening power-off and heating-off device as standard, ensuring comprehensive experimental safety. It also features overheat protection and thermocouple break protection;
⑤ Automatic parameter saving in case of emergencies, and power-on recovery function. It also features sensor self-diagnosis, leakage protection, over-temperature and fault alarm functions;
⑥ Embedded furnace door design: When the furnace door is closed, the door latch is partially embedded in the furnace, ensuring that high-temperature hot air does not leak out, resulting in minimal heat loss and excellent energy saving and consumption reduction effects, while also improving the temperature uniformity inside the furnace;
⑦ The casing is made of high-strength cold-rolled steel plate, combined with innovative surface spray coating technology, forming a corrosion-resistant and anti-static protection system that remains durable over time;
⑧ Imported high-quality nickel-containing HRE alloy heating wire (1000/1200℃), silicon carbide rod (1300/1400℃), silicon molybdenum rod (1600/1700/1800℃), providing fast heating, oxidation resistance, and a service life 3-5 times longer than ordinary heating elements, with more uniform heating;
⑨ Guaranteed after-sales service: Providing a comprehensive after-sales service network covering most areas of the country, ensuring worry-free use for users (Note: excluding a few remote towns and villages);
⑩ Technical support solutions: Providing comprehensive technical guidance through videos, telephone, and online video tutorials, intuitively demonstrating equipment performance and operation methods to help users quickly master the equipment.
Safety Features:
① The heating power is instantly cut off when the door is opened, providing real-time protection for experimenters;
② A comprehensive safety protection design provides triple safety protection for personnel, samples, and equipment;
③ Safety functions include: power-on self-diagnosis, sensor fault indication, over-temperature alarm and automatic power cut-off, and grounding protection.
① The vacuum atmosphere furnace adopts a modular integrated structure, integrating the heating chamber, temperature control system, and safety protection within a rigid frame. This results in a compact structure with excellent mechanical stability, providing a solid foundation for high-temperature applications;
② Shell Material: Made of selected high-quality cold-rolled steel plate (Q235), precisely formed using CNC technology. The surface is specially treated with phosphating and anti-static powder coating, creating a robust shell. It is anti-static, corrosion-resistant, and scratch-resistant, ensuring lasting quality;
③ Furnace Chamber: The furnace chamber consists of three parts: the furnace door, the furnace door frame, and the furnace body. The material is a high-performance artificial synthetic inorganic non-metallic material, amorphous silicon aluminum oxide. It is formed by integrated mold high-pressure die-casting, resulting in a dense overall structure, strong insulation, high temperature resistance, and excellent thermal stability and insulation;
④ Vacuum Chamber: The vacuum chamber is constructed from high-strength carbon steel, with a 3mm thick body and integrated circumferential reinforcing ribs, ensuring structural stability under ultra-high vacuum conditions of 10⁻⁶ Pa and providing excellent airtightness;
⑤ High-temperature resistant fluororubber seals are used, which perform stably in both vacuum and atmospheric environments, ensuring that the chamber maintains extremely high airtightness and integrity even under high-temperature conditions. ⑥ Control Area: The operating controls are located at the bottom of the device, mitigating the risk of controller damage due to excessive temperature rise;
⑦ Heating System: High-quality silicon carbide rods, silicon molybdenum rods, or resistance wires are arranged on both sides or around the furnace body. Through precise calculation and arrangement, a fast and uniform heat field distribution is achieved, resulting in extremely high energy conversion efficiency;
⑧ Insulation Layer: A multi-layer composite insulation design, consisting of alumina fiber boards and ceramic fiber blankets, forms a thermal barrier, significantly reducing heat loss, improving energy efficiency, and ensuring the outer casing temperature remains within a safe range;
⑨ Furnace Door: The furnace door adopts an embedded design, effectively preventing heat loss and maintaining temperature stability inside the furnace;
⑩ Furnace Door Safety: The heating power is automatically cut off when the door is opened, instantly protecting the safety of the experimenter;
⑪ Independent Temperature Limiting: A mechanical over-temperature protector, independent of the main control system, serves as a secondary safety measure. It automatically cuts off the power supply when the main control fails, preventing over-temperature accidents and ensuring safety and reliability (optional);
⑫ Electrical Control Box: The electrical system is concentrated in a sealed junction box with standardized wiring, and includes overcurrent, leakage, and short-circuit protection modules to ensure the electrical safety of the equipment under various operating conditions.
① Color LCD Screen Controller: Equipped with a color screen and touch buttons, displaying parameters such as set temperature, operating temperature, constant temperature time, and fault information on a single screen; integrates a microprocessor intelligent temperature control system with dynamic PID parameter adjustment, offering fast response speed and temperature overshoot suppression;
② Multiple Timing Modes: 1. Timing units can be freely switched between minutes and hours; 2. Two timing modes: timing from power-on and timing after reaching constant temperature;
③ Upgraded sound and light alarm environmental scanning microcomputer chip with stable data processing capabilities;
④ Features include over-temperature alarm, over-temperature heating cutoff, timed shutdown, power-on recovery, parameter memory, temperature correction, and self-tuning;
⑤ Power Failure Recovery Function: After a sudden power outage and subsequent power restoration, the equipment can automatically resume operation according to the original settings;
⑥ Self-tuning: When the temperature control accuracy is affected by changes in ambient temperature, self-tuning can be performed to improve temperature accuracy;
⑦ Multiple Modes: Switching between fixed-value mode and timed mode.
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Model |
VAF12-1 |
VAF12-4.5 |
VAF12-12 |
VAF12-36 |
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VAF14-1 |
VAF14-4.5 |
VAF14-12 |
VAF14-36 |
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VAF17-1 |
VAF17-4.5 |
VAF17-12 |
VAF17-36 |
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VAF18-1 |
VAF18-4.5 |
VAF18-12 |
VAF18-36 |
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Temperature Range |
Type 12 RT+50~1200℃ ,Type 14 RT+50~1400℃ , Type 17 RT+50~1700℃ ,Type 18 RT+50~1800℃ , |
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Temperature Control Accuracy |
1℃ |
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Heating Rate |
1~30℃/min(Nonlinear) |
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Timer Range |
0~9999min |
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Controller |
LCD digital display |
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Control Method |
Intelligent PID Fuzzy Control Technology |
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Display Method |
Digital display(set temperature&operating temperature) |
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Thermocouple |
1200℃,1400℃ K-type; 1700℃、1800℃ S-type |
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Heating Element |
1200℃ Imported HRE alloy (nickel-chromium alloy),1400℃ Silicon Carbide (SiC) Rods, 1700℃,1800℃ Silicon molybdenum rod |
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Security Protection |
Door-open Power Cutoff, Over-temperature Alarm & Cutoff, Leakage Protection |
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Intelligent Control |
Startup Self-check, Thermocouple Deviation Correction |
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Chamber Material |
High-purity alumina(Al₂O₃) |
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Chamber Dimensions |
100x100x100mm |
150x200x150mm |
200x300x200mm |
300x400x300mm |
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Exterior Dimensions |
1200℃ |
650x600x865mm |
670x600x930mm |
660x750x1020mm |
830x910x1265mm |
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1400℃ |
650x600x865mm |
620x650x930mm |
660x750x1020mm |
830x910x1265mm |
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1700℃ |
650x600x865mm |
670x700*930mm |
660x750x1020mm |
830x910x1265mm |
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1800℃ |
650x600x865mm |
670x700x930mm |
660x750x1020mm |
830x910x1265mm |
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Volume |
1L |
4.5L |
12L |
36L |
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Power Supply Voltage |
1200℃ |
220V/10A |
220V/18A |
220V/35A |
380V/30A |
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1400℃ |
220V/10A |
220V/25A |
380V/30A |
380V/50A |
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1700℃ |
220V/10A |
220V/25A |
380V/30A |
380V/50A |
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1800℃ |
220V/18A |
220V/25A |
380V/35A |
380V/50A |
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Rated Power(kW) |
1/2/2/3 |
3/4/4/4 |
6/9/9/12 |
9/16/16/18 |
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No. |
Name |
Parameters |
Reference Photo |
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1 |
5-inch Touchscreen Controller | ① Programs: 100 groups, 100 segments per group ② Each segment includes: Temperature, Vacuum level, Timer (0~9999 min/h) ③ Three-level access: Administrator, Engineer, Operator |
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3 |
Built-in Printer | ① Real-time printing ② Adjustable print interval: 0~9999 S/min |
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4 |
RS485 / USB Interface | ① Connect to micro printer, USB drive, or for remote communication ② Automatic fault detection for printer, USB drive, and communication |
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5 |
Inert Gas Inlet Valve | ① Introduce inert gas ② Stainless steel ball valve with manual flow adjustment |
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6 |
Gas Flow Meter | ① 1~10 L/min ② 3~30 L/min ③ 5~45 L/min ④ 10~100 L/min |
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Products provided by famous enterprises are deeply trusted by users.
Shanghai Dengsheng Instrument Manufacturing Co., Ltd. is a high-tech enterprise integrating R&D, production, sales, and service. We specialize in the manufacture of high-end laboratory equipment, including ovens, incubators, industrial furnaces, and environmental test chambers.
As Vacuum Atmosphere Furnace Manufacturers and Vacuum Atmosphere Furnace Suppliers in China, We boast an 8,000-square-meter modern production facility, a dedicated R&D team, 23 national patents, and ISO-9001 quality management system certification. Our solutions are widely used in cutting-edge fields such as aerospace, semiconductors, biomedicine, automotive, and new materials. We have established in-depth partnerships with top universities and industry leaders, supply Custom Vacuum Atmosphere Furnace, our products are exported to many countries and regions around the world.
Adhering to the principles of "Integrity, Innovation, and Win-Win," we are committed to becoming your trusted partner with reliable quality and dedicated service.
We welcome inquiries and cooperation from both new and existing customers, providing professional equipment solutions.
2025/11/27
2025/11/12
2025/11/12