Good Antioxidant Function And Environmental Compatibility Vacuum Coating Machine

The control system utilizes a PLC industrial automation system with a 7-inch touchscreen human-machine interface, enabling programmed operation, improving processing consistency and reliability, and offering convenient operation and intuitive readings.

Multi-system, multi-functional integration: Integrates vacuum, heating, nitrogen filling, and liquid addition modules, supporting hot nitrogen heating, multiple pre-vacuuming, and purging processes to ensure drying and film formation effects.

Strong environmental compatibility: Supports a wide temperature range of 20~200℃, with a cyclic vacuum degree of 100%. Pa, adaptable to different process requirements;

Extra-large observation window, full-process visualization operation, equipped with a double-layer extra-large observation window (double-layer tempered glass), real-time monitoring of the processing process, reducing the risk of misoperation;

Dehydration baking and adhesion (hydrophobic) treatment are completed in one machine, without transfer, effectively avoiding the danger of HMDS (hexamethyldisilazane C6H19NSi2) leakage;

Automated processing reduces chemical consumption by 80% compared to manual coating, has high repeatability and is harmless to the human body, supports mass production, and reduces costs;

The inner tank is made of corrosion-resistant and acid-alkali-resistant stainless steel (316L type), with rounded corners for easy cleaning; the outer shell is made of high-quality cold-rolled steel plate, with zero surface treatment, electrostatic powder coating, anti-static, dust-free, suitable for chip packaging cleanrooms;

More uniform processing, because it is coated onto the substrate surface in the form of steam, it is more uniform than liquid coating;

Saves chemical solution, coating onto the wafer surface in the form of steam, it can process up to 4 to 20 boxes of wafers at a time, further saving chemical solution; More environmentally friendly and safer: HMDS is a toxic chemical that can cause nausea, vomiting, abdominal pain, chest irritation, and respiratory tract irritation if inhaled. Because the entire process is completed in a closed environment, people do not come into contact with the liquid or its vapors, making it safer. Its exhaust gas is directly pumped into a dedicated exhaust gas collection pipeline or treated professionally, reducing environmental pollution.